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<title>ABTECH Scientific, Inc., - IMEu-animated</title>
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CONTENT="bioelectronics, biosensors, immunosensors, enzyme sensors, sensors, biochip, biochips, cancer, brain tumor, diagnostics, DNA, chips, arrays, microarrays, mems, biomems, enzymes, antibodies, molecular electronics">
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<td WIDTH="100%" BGCOLOR="#0000ff"><p ALIGN="RIGHT"> <font COLOR="#ffffff"
FACE="Verdana" size="2"><b> (animated) INTERDIGITATED MICROSENSOR ELECTRODES</b></font><sup><font
face="Verdana" size="1">TM</font></sup><b><font COLOR="#ffffff" FACE="Verdana" size="2">
(IMEs)<br>
</font><small><font face="Verdana" color="#00FFFF">(Microfrabricated Inerdigitated
Electrode Arrays (IDAs))</font></small></b></td>
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<td width="42%"><p align="center"><img src="gifs/IME-zoom-animation.gif" width="300"
height="300" alt="IME-zoom-animation.gif (88229 bytes)"></td>
<td BGCOLOR="#e2ebf3" WIDTH="58%"><p align="center"><u><font FACE="Verdana,Arial"
size="+1">IME Visualization</font></u></p>
<blockquote>
<p><small><font face="Verdana,Arial">The graphic to the left illustrates the pattern of
interdigitation of the electrodes. As one zooms in, you begin to see the individual digits
of the electrodes separated by mere microns. The digits are metal and the interdigit
spaces are glass.</font></small></p>
</blockquote>
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<td width="42%"><p align="center"><img src="gifs/IME-fab-animation.gif" width="300"
height="300" alt="IME-fab-animation.gif (182086 bytes)"></td>
<td BGCOLOR="#e2ebf3" width="58%"><p align="center"><font FACE="Verdana,Arial" size="+1">
<u>Steps in IME Fabrication</u></font> </p>
<ol>
<li><small><font face="Verdana">A titanium-tungsten (Ti/W) layer is first sputter-deposited
onto the borosilicate glass substrate. </font></small></li>
<li><small><font face="Verdana">The second layer applied is either gold (Au) or platinum
(Pt). </font></small></li>
<li><small><font face="Verdana">Using microlithographic techniques, one of our IME patterns
is formed from the metal layers. </font></small></li>
<li><p align="left"><small><font face="Verdana">Finally, a silicon nitride layer covers the
chip and is windowed using a fluorocarbon plasma to expose the interdigitaton and bonding
pads. <br>
</font></small> </p>
</li>
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<font SIZE="-1" FACE="Verdana,Arial">
<p align="center"></font><font FACE="Verdana,Arial" size="1">Last Revision 08/12/01; (c)
2000-2001 ABTECH Scientific, Inc.</font></p>
<p align="center"><font FACE="Verdana,Arial" size="1"><b>Contact: Ann M. Wilson, </b>Manager,
<br>
Applications Development ABTECH Scientific, Inc.<br>
911 East Leigh Street G24, Richmond, Virginia 23219<br>
Telephone Number: +1-804-783-7829 Fax Number: +1-804-783-7830<br>
e-mail: <a HREF="mailto:[email protected]">[email protected]</a></font></p>
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